ГОСТ Р ИСО 14644-6—2010
operator........................................................
organic...........................................................
outgassmg....................................................
oxidant...........................................................
P
particle...........................................................
particle concentration............................
particle s iz e ................................................
particle size cutoff d e vice .....................
particle size distribution........................
personnel.........................
...
.......................
pre-filter........................................................
pressure m tegnty...................................
process core....................., .......................
Q
qualification.....................
R
requalification..................
risk.
.
..............................................................
risk zone.......................................................
S
scanning.......................................................
separation descriptor............................
separative d e vice ...................................
settle plate....................................................
S M C ..............................................................
standard leak penetration.....................
start up...........................................................
static-dissipative property.....................
sup plier........................................................
supply airflow rate...................................
surface voltage level
..............
...
swab.............................................................
T
target level....................................................
test.................................................................
test a e ro so l................................................
threshold s iz e ..........................................
time-of-flight particle size measurement
total air flow rate......................................
transfer device..........................................
U
U descriptor................................................
ultrafme particle......................................
unidirectional airflow...............................
uniformity of a irflo w ................................
V
valida tion....................................................
verification....................................................
viable pa rticle..........................................
viable u n it....................................................
virtual im pa ctor...............................
V U ..................................................................
W
witness plate................................................
Z
zero count....................................................
2.98
2.99
2.100
2.101
2
.
102
.
2.103
2.104
2.105
2.106
2.107
2.108
2.109
2.110
2.111
2.112
2.113
2.114
2.115
2.116
2.117
2.118
2.119
2.125
2.120
2.121
2.122
2.123
2.124
surface molecular contamination . . .
2.125
2.126
2.127
2
.
128
.
2.129
2.130
2.131
2.132
2.133
2.134
2.135
2.136
2.137
2.138
2.139
2.140
2.141
2.142
2.143
2.144
2.143
2.145
2.65
17