ГОСТ Р ИСО 14644-8—2008
Библиограф ия
(1) ISO 14644-4.2001
Cleanrooms and associated controlled environments — Part 4: Design, construc
tion and starl-up
(2) ISO 14644-5
Cleanrooms and associated controlled environments — Pari 5: Operations
[3) ISO 14644-7Cleanrooms and associated controlled environments — Part 7: Separative
devices (clean air hoods, gloveboxes. isolators and mini-environments)
(4) ISO 14698 (all parts)
Cleanrooms and associated controlled environments — Biocontamination control
Методы оценки молекулярных загрязнений в воздухе — ссылочные документы
Пример методов оценки для определения молекулярных загрязнений в воздухе в следующих ссылочных
документах:
(5) JACA No. 34:2000
Standard for Evaluation of Airborne Molecular Contaminants Emitted from Const-
ruction/Composition Materials for Clean Room
[6J JACA No. 35A:2003
Standard for Classification of Air Cleanliness for Airborne Molecular Contaminant
(AMC) Level In Cleanrooms and Associated Controlled Environments and Its
Evaluation Methods
J7) JACA No. 43.2006
Standard for Evaluation Methods on Substrate Surface Contamination In Clean
rooms and Associated Controlled Environments
[8) SEMI E108-0301
Test Method for the Assessment of Outgassmg Organic Contamination from
Mlnlenvlronments using Gas Chromatography/Mass Spectrometry
(9) IEST-RP-CC031.1
Method for Characterizing Outgassed Compounds from Cleanroom Materials and
Components
(10) IDEMA Standard M11-99
General Outgas Test Procedure by Dynamic Headspace Analysis
111) ASTM D5127-99
Standard Guide for Ultra Pure Water Used in the Electronics and Semiconductor
Industry
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