Библиография
ГОСТ Р ИСО 14644-8—2014
[1]
ISO 14644-4:2001 Cleanrooms and associated controlled environments - Part 4: Design,
construction and start-up
[2]
ISO 14644-5:2004 Cleanrooms and associated controlled environments - Part 5: Opera
tions
[3]
ISO 14644-7:2004 Cleanrooms and associated controlled environments - Part 7: Separa
tive
devices (clean air hoods, glove boxes, isolators and mini
environments)
(4]
ISO 14698Cleanrooms and associated controlled environments - Biocontamina
(все части)tion
control
[5]
SEMI F21-1102Classification of Airborne Molecular Contaminant Levels in Clean Envi
ronments
(6]
Technology Roadmap for Semiconductors. Yield Enhancement Groups.
Section on Wafer Environmental Contamination Control
(71
IEST-G-CC035.1Design Considerations for AMC Filtration Systems in Cleanrooms
(8]
ASTM D5127-99 Standard Guide for Ultra Pure Water Used in the Electronics and Semi
conductor Industry
(91
JACA No. 34-Standard for Evaluation of Airborne Molecular Contaminants Emitted
:2000from Construction/Composition Materials for Clean Room
(10] JACA No. 35A- Standard for Classification of Air Cleanliness for Airborne Molecular
2003 Contaminant (AMC) Level in Cleanrooms and Associated Controlled
Environments and its Evaluation Methods
(11]JACA No 43-2006 Standard for Evaluation Methods on Substrate Surface Contamination
in Cleanrooms and Associated Controlled Environments
(12]SEMI E108-0307Test Method for the Assessment of Outgassing Organic Contamination
from Minienvironments using Gas Chromatography/Mass Spectrometry
(13]IEST-RP-CC031.2 Method for Characterising Outgassed Compounds from Cleanroom Ma
terials and Components
(14] IDEM A StandardGeneral Outgas Test Procedure by Dynamic Headspace Analysis
M11-99
(15]JIS B9917-8:2010 Standard for Classification of Air Cleanliness for Airborne Molecular
Contaminants (AMC) Level in Cleanrooms and Associated Controlled
Environments and its Evaluation Methods
(16]Airborne Molecular Contamination. Fujimoto.T. Takeda. К and Nonaka.
T. - ’Developments in Surface Contamination and Cleaning’ - William
Andrew Publishing 2007
(17]
SEMI E45-1101 Test Method for the Determination of Inorganic Contamination from Mi
nienvironments Using Vapour Phase Decomposition-Total Reflection X-
Ray Spectroscopy (VPD-TXRF), VPD-Atomic Absorption Spectroscopy
(VPD-AAS), or VPD/Inductively Coupled Plasma-Mass Spectrometry
(18]SEMI E460307
(19]
(20]
(21]
(VPD/ICP-MS)
Test Method for the Determination of Organic Contamination from Mi
nienvironments Using Ion Mobility Spectrometry (IMS)
K. Takeda. A. Mochizuki, T. Nonaka. I. Matsumoto. T. Fujimoto. T. Na-
kahara. "Evaluation of Outgassing Compounds from Cleanroom Con
struction Materials". Journal of the IEST. 44. No. 1, pp.28-32 (2001)
H. Tamura. S. Fujii, K. Yuasa and N. Kagi. "Evaluation Method of VOC
Emissions from Cleanroom Materials using the Double Cylinder Cham
ber". Journal of Architecture. Planning and Environmental Engineering.
No. 520, pp. 55-59(1999)
Hajime Tamura. Shuji Fujii and Naoki Kagi; "Estimate of the Time
Change of the Gas Emission Flux". Proceedings of the 48th IEST An
nual Technical Meeting and the 16th International Symposium on Con
tamination Control. ESTECH 2002 Proceedings, pp 7-15. Anaheim. Cal
ifornia U.S. (2002). BUEE 2001, Seoul. Korea (2001)
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